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Scanning thermochemical lithography of a conjugated polymer and the role of the thermal conductivity of the substrate

O. Fenwick, M. Tolk, G. Lazzerini, S. Ahmad, Y. Silberberg, L. Bozec, D. Credgington and F.Cacialli, (2012)

We show the use of a heated atomic force microscope (AFM) probe to pattern the conjugated polymer poly(p-phenylene vinylene) (PPV) from its precursor with resolution <28nm. We demonstrate such resolutions on high thermal conductivity substrates and discuss the advantages of a thermochemical approach to lithography.

Partners : UCL, ICL

Additional Data : Extended abstract EOS conference Paris - October 2010